A hard, wear-resistant aluminum nitride based coating

C - Chemistry – Metallurgy – 23 – C

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C23C 30/00 (2006.01) C23C 14/32 (2006.01) C23C 14/35 (2006.01)

Patent

CA 2562402

A hard, wear-resistant aluminum nitride based coating of composition Alx SiyMezN is proposed; x, y and z denote atomic fractions, the sum of which is between 0.95 and 1.05, and wherein Me is a metal dopant of group III to VIII and Ib transition metals or a combination thereof. The metal provides, during the coating process, an intrinsic electrical conductivity higher than the coating without the metal doping. The silicon content is in between 0.01 <= y <= 0.4 and the content of the metal dopant or dopants Me is 0.001 <= z <= 0.08, preferably 0.01 <= z <= 0.05 and most preferably 0.015 <= z <= 0.045.

L'invention concerne un revêtement dur, résistant à l'usure, à base de nitrure d'aluminium, dont la composition est Al¿x?Si¿y?Me¿z?N. Dans cette composition, x, y et z désignent des fractions atomiques dont la somme est comprise entre 0,95 et 1,05 et Me désigne un dopant métallique du groupe comprenant un élément des groupes III à VIII et Ib des métaux de transition ou des combinaisons de ces derniers. Le métal fournit, durant le procédé de revêtement, une conductivité électrique intrinsèque supérieure à celle obtenue sans le dopant métallique. Ce revêtement contient entre 0,01 et 0,4 unités de Si et entre 0,001 et 0,08 unités de dopant ou de dopants métalliques de Me, de préférence entre 0,01 et 0,05 unités et, mieux encore, entre 0,015 et 0,045 unités.

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