Frequency adjusting a piezoelectric device by lasering

Details Frequency adjusting a piezoelectric device by lasering Frequency adjusting a piezoelectric device by lasering

G - Physics

01

R

324/36

G01R 23/02 (2006.01) B08B 7/00 (2006.01) B08B 17/02 (2006.01) B23K 26/08 (2006.01) H03H 3/04 (2006.01)

Patent

CA 1120544

Abstract of the Disclosure Electrode material is laser machined from a piezoelectric device (10) to adjust its resonant frequency to nominal value. At the same time the device (10) is electronically cleaned by overdriving the device at a high current level to prevent loosely adhering lasered particles, which cause the device to be electrically unstable, from accumulating on the device. The simultaneous laser machining and electronic cleaning also eliminates erratic resonant frequency changes in the device (10) which occur if the electronic cleaning is performed after the laser machining. As the nominal resonant frequency value is approached, the device (10) is overdriven at successively lower current levels and the laser machining is carried out at respective successively lower rates.

320941

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