Method of producing thick schottky-barrier contacts

H - Electricity – 01 – L

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356/158

H01L 23/482 (2006.01) G03F 7/00 (2006.01) G03F 7/20 (2006.01) H01L 21/00 (2006.01) H01L 23/29 (2006.01)

Patent

CA 949230

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