Preparation of pyrophosphates

C - Chemistry – Metallurgy – 01 – B

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23/63, 148/2.8

C01B 25/42 (2006.01) C30B 31/16 (2006.01)

Patent

CA 1045784

Abstract of the Disclosure A method for the preparation of pyrophosphates such as SiP2O7 is disclosed, whereby the undesired formation of by-products such as Si2P2O9 is minimized. Such pyrophosphates are particularly suitable for the formation of solid semi- conductor diffusion sources, wherein the presence of by-products is seriously detrimental.

240860

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