C - Chemistry – Metallurgy – 08 – L
Patent
C - Chemistry, Metallurgy
08
L
400/2009
C08L 51/08 (2006.01) C08F 283/12 (2006.01) C08G 77/42 (2006.01) C08G 85/00 (2006.01) C08J 3/28 (2006.01) C08K 5/00 (2006.01) C08K 5/03 (2006.01) C08K 5/37 (2006.01) C08L 83/10 (2006.01) G03F 7/075 (2006.01)
Patent
CA 1280231
SILICONE-ORGANIC BLOCK POLYMER COMPOSITIONS ABSTRACT OF THE DISCLOSURE Block polymer compositions are provided which are useful as positive or negative resists utilizing aryl onium salts in combination with silicone-organic block polymers, such as polydimethylsiloxane-poly-t-butylmethacrylate block polymers. A silicone prepolymer is used in combination with certain polymerizable vinyl monomers such as t-butylmethacrylate. The silicone prepolymer has chemically combined pinacolate groups in the backbone or terminal positions which are capable of generating free-radicals upon thermolysis.
534958
Company General Electric
Oldham And Wilson
LandOfFree
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