Grooved heat pipe cooling apparatus for semiconductors

H - Electricity – 01 – L

Patent

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356/113

H01L 25/04 (2006.01)

Patent

CA 1295054

Abstract of the Disclosure A heat pipe type cooling apparatus for a semicon- ductor, comprises a plurality of first copper pipes, each of the first pipes having a plurality of V-shaped grooves formed in an inner surface thereof and arranged in a circumferential direction thereof, and a plurality of second copper pipes, each of the second pipes having a plurality of second grooves formed in an inner surface thereof, each of the second grooves having an opening narrower than an inner part thereof. A plurality of ceramic pipes connect the first pipes and the second pipes, through intermediate pipes made of a nickel-iron alloy. One end of each of the second pipes is inserted in a metal block on which a semiconductor is mounted.

586083

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