Optical beam concentrator

Details Optical beam concentrator Optical beam concentrator

G - Physics

02

B

88/113

G02B 5/08 (2006.01) B23K 26/073 (2006.01) G02B 19/00 (2006.01) G03F 7/20 (2006.01) H01S 3/00 (2006.01)

Patent

CA 1188138

ABSTRACT OPTICAL BEAM CONCENTRATOR An optical beam concentrator divides and redirects an incident beam to provide uniform irradia- tion along the length of a narrow rectangular area. The beam concentrator may form a part of an apparatus for laser irradiation of materials. The apparatus comprises a laser (30), a beam concentrator (33), and a support (35) for the material being irradiated. Depending on the system parameters, the apparatus is particularly useful for gettering defects in semiconductor device fabrication or other materials processing applications.

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