Method of fabrication for josephson tunnel junction

Details Method of fabrication for josephson tunnel junction Method of fabrication for josephson tunnel junction

H - Electricity

01

L

356/29, 352/49,

H01L 39/24 (2006.01)

Patent

CA 1168762

ABSTRACT OF THE DISCLOSURE There is disclosed a method of the fabrication for a Josephson junction. A surface of a base electrode of Nb or Nb compound is subjected to sputter cleaning and then to plasma oxidation in an atmosphere of a diluent gas and oxygen to form thereon an oxide layer serving as a tunnel barrier. A counter electrode is then formed on the oxide layer to provide the Josephson junction.

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