Process for preparing a thin film of superconducting...

Details Process for preparing a thin film of superconducting... Process for preparing a thin film of superconducting...

H - Electricity

01

L

117/103, 117/74

H01L 39/24 (2006.01) C04B 35/00 (2006.01) C23C 14/08 (2006.01) C23C 14/24 (2006.01) C30B 23/02 (2006.01)

Patent

CA 1313335

ABSTRACT OF THE DISCLOSURE A process for preparing a superconducting thin film of a compound oxide by a process which is similar to MBE technique. In the present process, a plurality of atom beams or molecular beams each contains one element selected from constituent elements of the compound oxide are directed onto a substrate in a predetermined order, so that a plurality of mono-molecular layers are deposited on the substrate.

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