Planar thin film transistors, transistor arrays, and a...

Details Planar thin film transistors, transistor arrays, and a... Planar thin film transistors, transistor arrays, and a...

H - Electricity

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356/30

H01L 29/38 (2006.01) G02F 1/1368 (2006.01) H01L 21/31 (2006.01) H01L 21/84 (2006.01) H01L 27/12 (2006.01) H01L 29/786 (2006.01)

Patent

CA 1175158

ABSTRACT OF THE DISCLOSURE A planar thin film transistor is described wherein each element of the transistor structure is disposed in a planar relationship with respect to the next adjacent layer. The method of manufacture generally includes the steps of depositing one of the elemental members of a thin film transistor structure and filling in the valleys between the elemental structure with an insulating material to form a planar surface which, in turn, forms the surface upon which the next planar layer is formed.

375559

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