Substrate heating apparatus for molecular beam epitaxy

Details Substrate heating apparatus for molecular beam epitaxy Substrate heating apparatus for molecular beam epitaxy

H - Electricity

01

L

356/178, 356/192

H01L 21/02 (2006.01) C30B 23/06 (2006.01)

Patent

CA 1207090

- 3 - Abstract A substrate heating arrangement suitable for use in ultra-high vacuum MBE includes a filament responsive to a DC current for generating thermal energy, a metallic enclosure surrounding the filament and having an aperture at one end thereof, an intermediate semiconductor substrate parallel to and separated from a semiconductor growth substrate, and a substrate support mounted to the enclosure capable of holding the substrates in the prescribed relationship. The intermediate semiconductor substrate regulates the temperature on the surface of the semiconductor growth substrate to be less than or equal to a fixed temperature (approximately 1100°C for silicon) regardless of the DC current applied to the filament.

446319

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