Photodetector arrangement for measuring the state of...

G - Physics – 01 – J

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G01J 4/04 (2006.01)

Patent

CA 1286520

ABSTRACT OF THE DISCLOSURE An apparatus and method for the measurement of at least one parameter of the state of polarization of a light beam is described. The apparatus includes only a photodetector and no other optical elements. The detector surface is partially specularly reflecting and intercepts the light beam at an oblique angle of incidence. The absorbed fraction of incident radiation produces a corresponding electrical output signal that is detected and from which the at least of parameter of the state of polarization can be determined. The detector may also be rotated to modulate the electrical output signal to determine the elliptic polarization of light except for handedness. A two detector ellipsometer is disclosed wherein light reflected from one detector is absorbed by the second detector and the entire system is rotated.

528085

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