Apparatus for coating a surface with photoresist

Details Apparatus for coating a surface with photoresist Apparatus for coating a surface with photoresist

B - Operations, Transporting

01

J

204/109, 32/23

B01J 19/10 (2006.01) B05B 5/00 (2006.01) B05D 1/00 (2006.01)

Patent

CA 1194288

ABSTRACT OF THE DISCLOSURE An apparatus for coating a substrate with a thin film of material. The coating material is converted to a mist by means of an ultrasonic nebulizer and transported by a carrier gas to a chamber which contains the substrate where the mist is allowed to settle onto the substrate under the force of gravity. Sonic means are also provided to increase the settling rate of the mist droplets to lessen the settling time. Refill chamber means are also provided to maintain the volume and concentration of the coating material in the nebulizer chamber over successive coatings.

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