Sputtered films of metal alloy oxides

Details Sputtered films of metal alloy oxides Sputtered films of metal alloy oxides

C - Chemistry, Metallurgy

23

C

117/157, 204/96.

C23C 14/08 (2006.01) C03C 17/245 (2006.01) C03C 17/36 (2006.01) C23C 14/18 (2006.01) C23C 14/34 (2006.01) G02B 1/11 (2006.01) G02B 5/20 (2006.01)

Patent

CA 1269060

Abstract of the Disclosure A metal alloy oxide film comprising Zinc and Tin and a high transmittance, low emissivity coated product employing the metal alloy oxide film as an antireflective film in combination with a metallic film such as silver on a nonmetallic transparent substrate. A sputtering method for production of a metal alloy oxide film comprising Zinc and Tin is also disclosed wherein a cathode target of a Zinc Tin alloy is placed along with a substrate to be costed in an evacuated chamber having an oxidizing atmosphere and the target is sputtered to deposit the film on the substrate.

493544

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