Resistance-heated boat for metal vaporization

C - Chemistry – Metallurgy – 23 – C

Patent

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32/23

C23C 14/26 (2006.01) F27B 14/10 (2006.01) F27D 1/00 (2006.01) F27D 5/00 (2006.01) H05B 3/10 (2006.01)

Patent

CA 1203373

RESISTANCE-HEATED BOAT FOR METAL VAPORIZATION ABSTRACT The resistance-heated boat of the present invention is comprised of a heating portion and a crucible portion separated by a heating conducting, substantially non-electrical conducting portion. The heating portion is fabricated of an electrically conductive material, such as a refractor metal carbide, nitride or oxide, capable of being resistance heated to high temperatures. The crucible portion of the boat provides a vaporization surface and is fabricated of materials selected for their ability to provide wettability by the metal to be vaporized, a desired chemical and physical resistance to the metal, or impurities in the metal, to be vaporized and to the vaporization atmosphere. Titanium diboride, zirconium diboride and mixtures thereof are eminently useful in providing a vaporization surface. The separating portion is formed of a heat-conducting, substantially non-electrical-conducting material, such as boron nitride. By providing a multi-layered boat, the invention permits the utilization of materials having the desired properties described above without the compromises of conventional boat constructions.

412890

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