Spectrometer lens for particle beam metrology

Details Spectrometer lens for particle beam metrology Spectrometer lens for particle beam metrology

H - Electricity

01

J

358/10

H01J 37/04 (2006.01) G01R 31/28 (2006.01) G01R 31/305 (2006.01) H01J 37/147 (2006.01) H01J 37/26 (2006.01) H01J 49/46 (2006.01) H01J 49/48 (2006.01)

Patent

CA 1253636

ABSTRACT OF THE DISCLOSURE A spectrometer-objective for particle beam metrology is formed by a short focal length objective lens having an integrated electrostatic retarding field spectrometer and a single-stage deflection unit arranged within a magnetic lens. To avoid deflecting secondary particles that are triggered at a specimen by a primary particle beam, nearly uniform electrical and magnetic deflection fields are generated by the deflection unit three-dimensionally oriented relative to one another such that their field vectors reside perpendicular to one another and respectively perpendicular to a velocity vector of the secondary particles attracted from the specimen.

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