Flow sensors

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G - Physics

01

F

26/159, 356/197,

G01F 3/04 (2006.01) G01F 1/28 (2006.01)

Patent

CA 1318152

ABSTRACT IMPROVEMENTS IN OR RELATING TO FLOW SENSORS A flow sensing device inckudes a micro-engineered cantilevered beam (1) on a semiconductor substrate (2) and is sensitive to a characteristic of the beam which is indicative of fluid flow. Fluid may cause displacement of the beam which depends on fluid velocity. Displacement may be determined, for example, by sensing capacitance between beam and contacts (4,5), by optical methods or using a strain gauge or stress sensor. A change in resonant frequency or a change in dsiplacememt of a heated beam due to fluid may be measured. End contacts may be fabricated. Circuitry can be incorporated on the same chip as the beam.

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