Preparation of superconducting oxide films on silicon and...

Details Preparation of superconducting oxide films on silicon and... Preparation of superconducting oxide films on silicon and...

C - Chemistry, Metallurgy

23

C

117/103, 204/96.

C23C 14/08 (2006.01) H01L 39/24 (2006.01)

Patent

CA 1332326

- 33 - Abstract of the Disclosure This invention is directed to a method of preparing a superconducting metal oxide film on silicon and silicon dioxide substrates. More particularly, the method comprises depositing a superconducting metal oxide precursor on the substrate and then subjecting it to annealing in an oxygen atmosphere according to a schedule which is critically defined as to time and temperature.

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