Low-energy scanning transmission electron microscope

Details Low-energy scanning transmission electron microscope Low-energy scanning transmission electron microscope

H - Electricity

01

J

358/10.1

H01J 37/28 (2006.01) G01N 27/00 (2006.01) H01J 37/26 (2006.01)

Patent

CA 1223678

ABSTRACT LOW-ENERGY SCANNING TRANSMISSION ELECTRON MICROSCOPE Low-energy scanning transmission electron microscopy is achieved by using a sharply pointed electrode as a source of electrons having energies less than 10 eV and scanning the electron emitting pointed source across the surface of a self-supported thin film of material to be investigated at an essentially constant distance on the order of nanometers. The electrons transmitted through the specimen are sensed by a suitable detector and the output signal of the detector is used to control a display unit, such as a CRT display or a plotter. A scanning signal generating means simultaneously controls both the scanning of the electron emitting point source and the display unit while a separation control unit holds the distance between the point source and surface at a constant value. The electron emitting point source and associated mechanical drives as well as the specimen film and electron detector are all positioned in a vacuum chamber and isolated from vibration by a damped suspension apparatus.

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