Semiconductor device having a body of amorphous silicon

Details Semiconductor device having a body of amorphous silicon Semiconductor device having a body of amorphous silicon

H - Electricity

01

L

356/153

H01L 21/20 (2006.01)

Patent

CA 1213375

AMORPHOUS SEMICONDUCTOR METHOD AND DEVICES ABSTRACT OF THE DISCLOSURE Preparation of amorphous semiconductor material that is suitable for use in a wide variety of devices by the pyrolytic decomposition of one or more gaseous phase polysemiconductanes, including polysilanes and polygermanes.

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