Optical reduction system

Details Optical reduction system Optical reduction system

G - Physics

02

B

88/104

G02B 17/08 (2006.01) G02B 13/00 (2006.01) G03F 7/20 (2006.01)

Patent

CA 1320375

MI-3826 ABSTRACT OF THE INVENTION An unobscured catadioptric optical reduction system wherein all refractive elements are made of the same material. From its long conjugate end to its short conjugate end the system comprises a first lens group, a beamsplitter, a second lens group, a mirror and a third lens group arranged so that radiation entering the system at its long conjugate end passes through the first lens group, the beamsplitter, the second lens group, and is reflected by the mirror back through the second lens group and is reflected by the beamsplitter through the third lens group. Aberrations of the mirror are corrected by the refractive elements. Lateral color correction is obtained by balancing the power of the first lens group against the power of the third lens group.

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