Process for making solid-state color imaging device

Details Process for making solid-state color imaging device Process for making solid-state color imaging device

G - Physics

03

F

356/197

G03F 7/02 (1980.01)

Patent

CA 1189199

Process for Making Solid-State Colour image device Abstract Processes for making an electronic color imaging device comprising a planar array of charge-handling semiconductive photosensors and a multicolor filter means comprising a planar array of color filter elements superimposed in precise registration over the sensing area of the photosensors. In general, the processes comprise the steps of: (1) successively coating on a planar array of semiconductive photosensors a plurality of photoresponsive layers; (2) subjecting each photoresponsive layer in succession to radiation to provide an exposed area of said layer; (3) removing unexposed photoresponsive coating from each layer in succession; and, (4) dyeing exposed areas of each layer of said coating in succession to obtain a series of chromatic filter elements. Color filter elements having dimensions of approximately 6µ x 6µ may be produced by the processes.

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