Method of measuring semiconductor pressure sensor

Details Method of measuring semiconductor pressure sensor Method of measuring semiconductor pressure sensor

G - Physics

01

L

73/3

G01L 9/00 (2006.01) G01L 9/06 (2006.01)

Patent

CA 1308933

ABSTRACT OF THE DISCLOSURE A method of measuring a semiconductor pressure sensor comprises the steps of mounting a wafer formed with diaphragm type semiconductor pressure sensors on a wafer stage, evacuating air existing between the back surface side of said diaphragm type semiconductor pressure sensors and said wafer stage through at least one hole provided in said wafer stage to deform, diaphragms of said semiconductor pressure sensors, and measuring the pressure sensitivity of each of said semiconductor pressure sensors from the surface side of said semiconductor pressure sensors.

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