G - Physics – 01 – R
Patent
G - Physics
01
R
356/118
G01R 31/28 (2006.01) G01R 31/305 (2006.01)
Patent
CA 1254670
ABSTRACT OF THE DISCLOSURE A method for function checking microelectronic components inside LSI circuits, particularly during the development phase, provides localization and imaging of regions of a specimen which carry defined signals that depend on the operating status of the circuit. For localizing the points carrying the defined electrical signals, a primary beam reads the signal at the measuring point and a secondary signal derived therefrom is compared in a detector arrangement to the anticipated or sought-after signal by a correlation method. For the correlation, the intensity of the primary beam or the current of the secondary particles are modulated alternately with the sought-after or anticipated signal and, respectively, with the negation of the sought-after or anticipated signal and the measured secondary signal is integrated. Part of the integrated secondary signal changes with the frequency prescribed by the signal change, which is filtered out and supplied to an evaluator circuit which controls the intensity of a display means, such as a picture screen.
525271
Aktiengesellschaft Siemens
Fetherstonhaugh & Co.
LandOfFree
Method and apparatus for identifying points on a specimen... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for identifying points on a specimen..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for identifying points on a specimen... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1268075