Means and methods for heating semiconductor ribbons and...

Details Means and methods for heating semiconductor ribbons and... Means and methods for heating semiconductor ribbons and...

H - Electricity

01

L

356/187, 327/2

H01L 21/477 (2006.01) H05B 6/68 (2006.01) H05B 6/70 (2006.01) H05B 6/80 (2006.01)

Patent

CA 1277717

ABSTRACT OF THE DISCLOSURE Means and method including a novel waveguide sample holder for applying traveling microwaves to heat thin low-resistivity semiconductor ribbons and wafers without a susceptor. Traveling microwaves are applied to the semiconductor materials, both with and without a traveling wave resonator. Efficient coupling is obtained by unique placement of the samples in the waveguide.

542600

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