Method of fabricating imaging apparatus

Details Method of fabricating imaging apparatus Method of fabricating imaging apparatus

H - Electricity

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H01L 27/146 (2006.01) G03F 7/20 (2006.01) H01L 21/00 (2006.01) H01L 21/027 (2006.01) H01L 21/82 (2006.01) H01L 31/02 (2006.01)

Patent

CA 1309481

ABSTRACT METHOD OF FABRICATING IMAGING APPARATUS In a method for fabricating imaging apparatus, adjoining regions, each forming only part of the active area of the complete device, are laid down separately, enabling larger active areas to be produced than would otherwise be possible using conventional wafer stepper equipment. In the complete device, imaging may be arranged over the boundary between the regions and/or charge may be transferred across the boundary.

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