Surface inspection apparatus

Details Surface inspection apparatus Surface inspection apparatus

G - Physics

01

N

340/124.5

G01N 21/88 (2006.01) G01N 21/95 (2006.01)

Patent

CA 1283964

ABSTRACT OF THE DISCLOSURE A surface inspection apparatuses having a light source for irradiating an uneven surface of an object to be inspected, a photoelectric conversion sensor for picking up the uneven surface of the object and generating a video signal thereof, and an electronic processor for processing the video signal to inspect the surface of the object, in which an optical mask is located in front of the light source so as to restrict the passage of the light from the light source with a predetermined pattern, whereby the irregular light refection of the light from the light source, which passed through the optical mask, on the uneven surface becomes substantially uniform.

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