Positive and negative working radiation sensitive mixtures...

Details Positive and negative working radiation sensitive mixtures... Positive and negative working radiation sensitive mixtures...

G - Physics

03

F

96/175

G03F 7/004 (2006.01) G03F 7/039 (2006.01)

Patent

CA 1338178

Positive and negative working radiation sensitive mixtures suitable in particular for producing relief patterns contain a polymeric binder and an organic compound whose solubility in an aqueous alkaline developer is increased by the action of acid and which contains at least one acid cleavable group and also an additional group which upon irradiation forms a strong acid, the polymeric binders being reaction products of polymers that contain phenolic hydroxyl groups with dihydropyran or with alkyl vinyl ethers.

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