Liquid crystal light valve and associated bonding structure

Details Liquid crystal light valve and associated bonding structure Liquid crystal light valve and associated bonding structure

G - Physics

02

F

345/56

G02F 1/135 (2006.01) C23C 14/02 (2006.01) H01L 31/08 (2006.01)

Patent

CA 1289651

LIQUID CRYSTAL LIGHT VALVE AND ASSOCIATED BONDING STRUCTURE ABSTRACT OF THE DISCLOSURE A LCLV device exhibiting improved performance capabilities fabricated using an amorphous silicon photoconductor layer (13), a cadmium telluride blocking layer (17), a titanium dioxide mirror (19) and a special bonding layer (15) which enables attachment of the cadmium telluride blocking layer (17) to the amorphous silicon (13). The bonding layer (15) includes silicon dioxide sputtered in successive argon and argon/oxygen atmospheres followed by cadmium telluride sputtered in successive argon/oxygen and argon atmospheres. The bonding layer (15) may also be used in other applications to bond a cadmium telluride layer to single crystal silicon or silicon dioxide layers.

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