Method and system for high-speed, high-resolution, 3-d...

G - Physics – 02 – B

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G02B 27/22 (2006.01) G01B 11/02 (2006.01) G01B 11/24 (2006.01)

Patent

CA 1287486

P-305 METHOD SND SYSTEM FOR HIGH-SPEED, HIGH-RESOLUTION 3-D IMAGING OF AN OBJECT AT A VISION STATION ABSTRACT A method and system for high-speed, high- resolution, 3-D imaging of an object at a vision station including an anamorphic magnification and field lens system to deliver the light reflected from the object to a small area position detector having a position-sensing direction. Preferably, an acousto-optic deflector having no moving parts together with associated lens elements scans a beam of modulated laser light in a scanning direction across the object to be inspected to produce a telecentric, flat field scan. The deflector has a feedback loop to enable uniform illumination of the object (i.e. flat field correction). The light scattered from the object is collected by a telecentric receiver lens, A combined spatial and polarization filtering plane preferably in the form of a programmable mask is provided, as a telecentric stop to control the polarization and acceptance angles of the collected light. A focusing lens is positioned immediately behind the filtering plane and is utilized as a telescope objective. The lens system includes a negative cylinder lens having a relatively large focal length and an anamorphic field lens having a relatively small focal length. The cylinder lens and the reduction lens magnify the image in the position sensing direction of the position detector and the field lens delivers the light to the position detector. The position detector is a photodetector such as a lateral effect photodiode or a rectangular lateral effect detector together with its pre-amplifier. The pre-amplifier provides a pair of electrical signals which are utilized by signal processing circuitry to compute the position of the centroid of the light spot. To extend the depth of range, a controller is coupled to the signal processing circuitry and controls movement of a tracking mirror which, in affect, enlarges the field of view of the position detector.

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