Metal vapour deposition

C - Chemistry – Metallurgy – 23 – C

Patent

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Details

32/23, 117/82

C23C 14/50 (2006.01) C23C 14/54 (2006.01)

Patent

CA 1238819

Abstract of the Disclosure A method and an apparatus are provided for the production of a layer of a metallic material by deposition from the vapour phase onto an exposed surface of a collector. The collector is a rotary drum comprising a hollow cylindrical outer member, a coaxial hub, and a plurality of spokes pivotally connected to the outer member and to the hub, all the spokes being aligned at the same oblique angle to the radius at the respective connections to the hub. Thermal expansion of the outer member relative to the spokes is accommodated by rotation of the outer member relative to the hub and a consequent change in the oblique angle, so minimizing thermally induced stresses in the spokes. The exposed surface may be maintained at a desired temperature by passing a heat transfer liquid through ducts within the rotary drum and controlling the temperature of the liquid in accordance with the thickness of the deposited layer.

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