G - Physics – 01 – F
Patent
G - Physics
01
F
73/69
G01F 1/68 (2006.01)
Patent
CA 1233666
ABSTRACT OF THE DISCLOSURE Semiconductor device for use in various types of apparatus, including flow sensors, comprising a thin film member comprising an electrical element. The device further comprises a semiconductor body supporting the thin film member out of contact with the body and apparatus for electrically pulsing the electrical element.
524034
Higashi Robert E.
Johnson Robert G.
Honeywell Inc.
Smart & Biggar
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