Method and apparatus for structural analysis

G - Physics – 01 – N

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88/0.14, 88/0.18

G01N 23/00 (2006.01)

Patent

CA 1203405

METHOD AND APPARATUS FOR STRUCTURAL ANALYSIS ABSTRACT Apparatus for the non-destructive structural analysis of a solid object, the apparatus comprising: a laser pulse generating device to generate a laser beam pulse at a selected frequency for application to an input surface of an object to be analysed to generate an elastic wave pattern in the object; a scanning electron microscope for scanning at a frequency which is a multiple of the laser beam pulse frequency, the generated wave pattern over an output surface of the object to provide an output signal; a control device for controlling operation of the scanning electron microscope in relation to the laser beam pulse to progressively vary the phase difference between the scan- ning frequency and the laser beam pulse frequency, and a processing device for processing such an output signal to allow generation of a representative signal representative of such a wave pattern at a preselected time instant; generating means for generating a composite signal from such a representative signal and from a reference signal derived from the laser pulse frequency; and a digital computer for processing such a composite signal to provide reconstruction means in the form of a digital hologram for reconstructing a representation of the object. The invention further extends to a corresponding method.

416198

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