Organotin compounds containing fluorine useful for forming...

C - Chemistry – Metallurgy – 07 – F

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C07F 7/22 (2006.01) C23C 16/40 (2006.01)

Patent

CA 1276160

Abstract This invention relates to organotin compounds con- taining fluorine which are particularly useful for forming fluorine-doped tin oxide coatings by the chemi- cal vapor deposition method. In the preferred embodi- ment, the compound is monobutyldichlorotin tri- fluoroacetate, which is prepared by reaction of monobutyltin trichloride and trifluoroacetic acid.

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