Oxygen analysis employing absorption spectroscopy

Details Oxygen analysis employing absorption spectroscopy Oxygen analysis employing absorption spectroscopy

G - Physics

01

N

313/4, 73/55

G01N 21/27 (2006.01) G01J 3/433 (2006.01) G01N 21/33 (2006.01)

Patent

CA 1261167

OXYGEN ANALYSIS EMPLOYING ABSORPTION SPECTROSCOPY ABSTRACT A method and apparatus are described for detecting the presence and amount of elemental oxygen in a sample cell. The intensity of extreme ultraviolet light passing through the sample cell at a wavelength band overlapping at least one of the Schumann-Runge absorption lines of oxygen is detected and compared with a predetermined non-absorbed condition of the ultraviolet light. The non-absorbed condition may be achieved by narrowing the wavelength band such that the band does not overlap the Schumann-Runge absorption line, or may be achieved by detecting the ultraviolet light passing through a reference cell. Also described is a novel ultraviolet source in which a cold zone captures neutral atoms of the emission gas to reduce the affect of resonance absorption of emitted ultraviolet light by such neutral atoms.

492501

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