Process for aryl-diazide sulfonic acids

Details Process for aryl-diazide sulfonic acids Process for aryl-diazide sulfonic acids

C - Chemistry, Metallurgy

07

C

260/396.5

C07C 309/53 (2006.01)

Patent

CA 1310975

20731-987 ABSTRACT A process for the preparation of aryl-diazide-sulfonic acids by a series of sequential in-situ process steps. The process comprises the nitrosation of a hydroxyarylsulfonic acid; conversion of the nitroso-derivative to a sulfamate which is then diazotized to the diazide. Temperature and pH are maintained in predetermined ranges to maintain the reaction products in solution without the formation side-products or the need to isolate intermediates. The process of the invention is part- icularly useful in the preparation of light-sensitive materials such as naphthoquinonediazide sulfonic acids which are used in the preparation of photoresist compositions. The invention provides a high purity product at a high material efficiency, high equipment utilization, low effluent discharge, and reduced cost.

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