Method of, and apparatus for, separating wafers from a wafer...

B - Operations – Transporting – 28 – D

Patent

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Details

B28D 5/00 (2006.01) B65G 59/04 (2006.01)

Patent

CA 2707804

In a method of separating wafers (12) from a vertical wafer stack (16), the wafers (12) are transported away individually from above via movement means (23) which act from above. The movement means (23) are designed as circulating belts (24), with a suction surface (25) against which the uppermost wafer (12) is made to abut, wherein the abutment of the wafer (12) against the suction surface (25) is enhanced by negative pressure or suction. In order to separate a plurality of wafers (12) located one upon the other, the movement means (23) are subjected to at least one of the following two steps: a) water (30) is jetted with force against the leading edge of the uppermost wafer (12), the water being directed obliquely from beneath the latter b) the movement means (23) guide the wafer (12) over a stripping device (32) which butts against the underside of the moving wafer (12) from beneath and both forces the wafer (12) against the suction surface (25) and generates a braking action thereon. Thereafter, the wafer (12) is moved on to a transporting path (35, 37) in order to be transported on for further processing.

Selon l'invention, dans un procédé d'extraction une à une de galettes (12) d'une pile verticale (16) de galettes, les galettes (12) sont éloignées une à une par le haut à l'aide de moyens de déplacement (23) qui les engagent par le haut. Les moyens de déplacement (23) sont configurés comme bandes sans fin (24) avec une surface d'aspiration (25) sur laquelle la galette supérieure (12) est appliquée, une dépression ou une aspiration renforçant la pose de la galette (12) sur la surface d'aspiration (25). Pour séparer plusieurs galettes (12) superposées, au moins l'une des deux étapes ci-dessous est réalisée sur les moyens de déplacement (23) : a) de l'eau (30) est projetée vigoureusement et obliquement en dessous du bord avant de la galette supérieure (12), b) les moyens de déplacement (23) conduisent la galette (12) au-dessus d'un dispositif de raclage (32) qui s'applique par le bas sur le côté inférieur de la galette (12) déplacée, repousse la galette (12) contre la surface d'aspiration (25) et y exerce également un effet de freinage. Ensuite, la galette (12) est amenée sur une bande transporteuse (35, 37) pour être transportée plus loin vers un autre traitement.

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