Preparation of titanium nitride from organometallic precursors

Details Preparation of titanium nitride from organometallic precursors Preparation of titanium nitride from organometallic precursors

C - Chemistry, Metallurgy

01

B

C01B 21/076 (2006.01) C04B 41/50 (2006.01) C04B 41/87 (2006.01) C23C 18/02 (2006.01) C23C 18/12 (2006.01)

Patent

CA 2052967

- 21 - ABSTRACT A titanium tetrahalide is reacted with at least one disilazane to prepare a titanium-containing organometallic precursor, which is thereafter pyrolyzed to form crystalline titanium nitride. 5374I

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