G - Physics – 02 – B
Patent
G - Physics
02
B
G02B 26/02 (2006.01) B81B 3/00 (2006.01) G02B 6/26 (2006.01) G02B 6/35 (2006.01) H04Q 11/00 (2006.01) G02B 6/42 (2006.01)
Patent
CA 2379537
A microelectromechanical (MEMS) device (100) has a substrate (102) and a generally planar moving element (106), such as a mirror, disposed in parallel to the surface (108) of the substrate. An actuator is operatively engageable with the moving element (106) for selectively actuating the moving element (106) between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device (100) may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.
Un dispositif micro-électromécanique (MEMS) possède un substrat, et un élément mobile généralement plan, tel qu'un miroir, positionné parallèlement à la surface de ce substrat. Un dispositif de commande est en contact opérationnel avec cet élément mobile afin de commander de façon sélective ledit élément mobile entre une première position dans un plan horizontal par rapport à la surface du substrat et une seconde position dans ce plan. Ce dispositif MEMS peut être utilisé efficacement sous forme de commutateur optique. Divers dispositifs de commande peuvent être utilisés. On fabrique de préférence ce dispositif MEMS en utilisant un processus de micro-usinage des surfaces.
Marks & Clerk
Memlink Ltd.
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