B - Operations – Transporting – 01 – J
Patent
B - Operations, Transporting
01
J
B01J 47/00 (2006.01) B01J 20/28 (2006.01) B01J 47/12 (2006.01) A61K 38/00 (2006.01)
Patent
CA 2261862
A filter sheet is provided which comprises a self-supporting fibrous matrix having immobilized therein particulate filter aid and particulate ion exchange resin, wherein said particulate filter aid and particulate ion exchange resin are distributed substantially uniformly throughout a cross section of said matrix. A process for removing ionic impurities from a photoresist solution is also provided which comprises passing the photoresist solution through said filter sheet to remove ionic impurities therefrom.
Filtre plat comprenant une matrice fibreuse autonome dans laquelle est immobilisée un accessoire filtrant en particules et une résine échangeuse d'ions en particules, ledit accessoire filtrant en particules et ladite résine échangeuse d'ions en particules étant répartis sensiblement uniformément à travers une section transversale de ladite matrice. Procédé servant à supprimer les impuretés ioniques depuis une solution de résine photosensible et consistant à faire passer cette solution à travers ledit filtre plat, afin d'en supprimer les impuretés ioniques.
Hou Kenneth C.
Ostreicher Eugene A.
Sale Richard D.
Cuno Incorporated
Ridout & Maybee Llp
LandOfFree
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