Microelectromechanical optical switch and method of...

G - Physics – 02 – B

Patent

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G02B 26/02 (2006.01) B81B 3/00 (2006.01) G02B 6/26 (2006.01) G02B 6/35 (2006.01) H02N 1/00 (2006.01)

Patent

CA 2379179

A MEMS-based optical switch (100) having improved characteristics and methods for manufacturing the same are provided. In accordance with one embodiment, an optical switch includes a single comb (122) drive actuator (104) having a deflecting beam structure (124) and a mirror (102) coupled to the actuator. The mirror is capable of being moved between an extended position interposed between waveguide channels (106) and a retracted position apart from the waveguide channels. The actuator applies a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force.

La présente invention concerne un commutateur optique (100) de type MEMS à caractéristiques améliorées et ses procédés de fabrication. Selon un des modes de réalisation, un commutateur optique comprend un actionneur d'entraînement (104) à un seul peigne (122) présentant une structure (124) à faisceaux de déflexion et un miroir (102) couplés à l'actionneur. Ce miroir peut être déplacé entre une position déployée interposée entre les canaux guides d'ondes (106), et une position repliée écartée des canaux guides d'ondes. L'actionneur applique une force pouvant défléchir la structure du faisceau et déplacer le miroir dans la position déployée et/ou repliée, la structure du faisceau faisant revenir le miroir à la position déployée ou repliée lorsqu'aucune force n'est appliquée.

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