Method of actuating mems switches

Details Method of actuating mems switches Method of actuating mems switches

G - Physics

02

B

G02B 26/02 (2006.01)

Patent

CA 2419309

A switching signal having multiple sequential pulses is applied to a MEMS switch. A first pulse moves the switch from a first switch position toward a second switch position. After a selected dwell period, a second pulse is applied to dampen ringing or overshoot of the movable portions of the switch. In a further embodiment, non-symmetrical switching signals are used to cycle the switch from the first state to the second state, and back to the first.

L'invention concerne un signal de commutation comprenant plusieurs impulsions séquentielles, lequel signal est appliqué à un commutateur MEMS. Une première impulsion déplace le commutateur depuis une première position de commutation vers une seconde position de commutation. Après un temps de passage sélectionné, une seconde impulsion est appliquée afin d'amortir la suroscillation des portions amovibles du commutateur. Dans un autre mode de réalisation, des signaux de commutation non symétriques sont utilisés pour cycler le commutateur depuis un premier état vers un second état, puis, de nouveau, dans un premier état.

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