Sputtering apparatus

Details Sputtering apparatus Sputtering apparatus

H - Electricity

01

J

204/167.3

H01J 37/34 (2006.01) C23C 14/56 (2006.01)

Patent

CA 1077437

ABSTRACT A sputtering machine which has a rotary anode that is insulated from its supporting structure and maintained at a voltage differing from that of the supporting structure. The temperature of the surface of the anode is controlled through circulating heat exchange liquid.

263664

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