Semiconductor component for high voltage

H - Electricity – 01 – L

Patent

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Details

H01L 29/06 (2006.01) H01L 29/41 (2006.01) H01L 29/49 (2006.01) H01L 29/70 (2006.01) H01L 29/78 (2006.01) H01L 29/786 (2006.01)

Patent

CA 2261753

The invention discloses a high frequency MOS transistor structure with an extended drift region, which modulates the resistance in the drift region of the MOS transistor. The extended gate layer is obtained by an extra semiconductor layer forming a second MOS structure on top of a thin gate oxide layer. The electrical field will then be uniformly distributed laterally in the extended drift region. This design makes it possible to produce a MOS transistor with a short channel length and an extended drift region with low doping concentration and still having very low on-resistance together with a high breakdown voltage.

L'invention porte sur une structure de transistor MOS pour hautes fréquences dont la zone de migration étendue module la résistance de ladite zone du transistor MOS. L'extension de la couche grille étendue provient d'une couche supplémentaire de semi-conducteur formant une deuxième structure MOS au dessus de la couche mince d'oxyde de la grille. Le champ électrique se trouve alors uniformément réparti latéralement dans la zone de migration étendue. Cette conception permet de produire un transistor MOS à canal court et une zone de migration étendue à faible concentration de dopage et présentant néanmoins une très faible résistance à l'état passant ainsi qu'une tension de claquage élevée.

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