H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 39/22 (2006.01) H01L 39/14 (2006.01) H01L 39/24 (2006.01)
Patent
CA 2186840
A FET type superconducting device comprises a substrate having a principal surface, a thin superconducting channel formed of an oxide superconductor layer over the principal surface of the substrate, a superconducting source region and a superconducting drain region formed of an oxide superconductor layer over the principal surface of the substrate at the both ends of the superconducting channel which connects the superconducting source region and the superconducting drain region, so that superconducting current can flow through the superconducting channel between the superconducting source region and the superconducting drain region and a gate electrode on a gate insulator disposed on the superconducting channel for controlling the superconducting current flowing through the superconducting channel by a signal voltage applied to the gate electrode, wherein the superconducting device is isolated by a isolation layer directly formed on the principal surface of the substrate, the superconducting layer of the superconducting channel is directly formed on the principal surface of the substrate and the gate electrode is formed on the isolation layer excluding a portion on the gate insulator.
Bereskin & Parr Llp/s.e.n.c.r.l.,s.r.l.
Sumitomo Electric Industries Ltd.
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