B - Operations – Transporting – 05 – D
Patent
B - Operations, Transporting
05
D
B05D 3/12 (2006.01) B05C 11/02 (2006.01) B05C 11/08 (2006.01) B05D 1/00 (2006.01) B05D 3/02 (2006.01) B08B 3/00 (2006.01) B08B 7/00 (2006.01) B08B 7/02 (2006.01) B08B 9/00 (2006.01) H01L 21/00 (2006.01)
Patent
CA 2315225
A spin coating method comprises applying a carbon dioxide liquid to surface portion of a substrate (12); and then rotating the substrate (12) about an axis to distribute the carbon dioxide liquid on the substrate (12). The carbon dioxide liquid can be distributed on the substrate (12) as a carrier, for the purpose of depositing a material such as a coating on the substrate (12). In addition, the carbon dioxide liquid can be distributed on the substrate (12) as a solvent, for the purpose of solubilizing, dissolving or removing a material previously deposited on the surface of the substrate (12). Apparatus (10) for carrying out the present invention is also disclosed.
Un procédé de revêtement par centrifugation consiste à appliquer du dioxyde de carbone liquide sur une partie de surface d'un substrat (12) et ensuite à faire tourner le substrat (12) autour d'un axe afin de distribuer le dioxyde de carbone liquide sur le substrat (12). Le dioxyde de carbone liquide peut être distribué sur le substrat (12) sous la forme d'un support, afin de déposer un matériau tel qu'un revêtement sur le substrat (12). En plus, le dioxyde de carbone liquide peut être distribué sur le substrat (12) en tant que solvant, afin de solubiliser, de dissoudre ou d'enlever un matériau déposé préalablement sur la surface du substrat (12). Un appareil (10) de mise en application de la présente invention est également décrit.
Carbonell Ruben G.
Desimone Joseph M.
North Carolina State University
Robic
University Of North Carolina At Chapel Hill
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