Fluid control device

Details Fluid control device Fluid control device

G - Physics

05

D

G05D 7/00 (2006.01) F15B 13/00 (2006.01) F15B 13/02 (2006.01) F16K 27/00 (2006.01) G05D 16/00 (2006.01)

Patent

CA 2204939

A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.

Dispositif de régulation du débit de fluides formant, dans un corps de vanne principal, un passage principal communiquant avec une entrée de canalisation dans un régulateur de débit-masse, et un passage secondaire relativement long et un passage secondaire relativement court communiquant toutes deux avec le passage principal. Le gaz qui doit être d'une grande pureté emprunte le passage secondaire relativement long.

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