Thermochemical nanolithography components, systems, and methods

C - Chemistry – Metallurgy – 08 – L

Patent

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Details

C08L 33/14 (2006.01) B82Y 30/00 (2011.01) B82B 3/00 (2006.01) C08J 3/24 (2006.01)

Patent

CA 2761966

Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.

L'invention concerne des composants de nanolithographie, des systèmes, et des procédés. Les systèmes et les procédés utilisent généralement un embout de microscope à force atomique chauffé par une résistance pour induire thermiquement une modification chimique dans une surface. L'invention concerne également certaines compositions polymères.

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