Microstructure design for high ir sensitivity (u)

Details Microstructure design for high ir sensitivity (u) Microstructure design for high ir sensitivity (u)

H - Electricity

01

L

H01L 31/09 (2006.01)

Patent

CA 2070531

A microstructure design for high IR sensitivity having a two level infrared bolometer microstructure, the lower level having a reflective metal film surface such as Pt, Au, or Al to reflect IR penetrating to that level, the upper level being separated from the lower level by an air gap of about 1-2 microns which allows the reflected IR to interfere with the incident IR and increase the sensitivity to a higher level.

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