Superconducting device having layered structure composed of...

Details Superconducting device having layered structure composed of... Superconducting device having layered structure composed of...

H - Electricity

01

L

H01L 39/12 (2006.01) H01L 39/22 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2047413

A superconducting device includes a first thin film of oxide superconductor material formed on a substrate, a second thin film of insulator material stacked on the first thin film of oxide superconductor material, a third thin film of oxide superconductor material formed on the second thin film of insulator material. The second thin film of insulator is formed of an amorphous oxide including the same constituent elements as those of the oxide superconductor material of the first thin film. The second thin film of insulator is formed by heat-treating the first thin film of oxide superconductor material in a gaseous atmosphere bringing a surface of the oxide superconductor material into an amorphous condition, after the first thin film of oxide superconductor material is formed on the substrate.

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